Method of Fabrication Polymer Waveguide

ABSTRACT

A method of fabricating a waveguide device is disclosed. The method includes providing a substrate having an elector-interconnection region and a waveguide region and forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region. The method also includes bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack. A reflecting-mirror trench is formed in the substrate in the waveguide region, and a reflecting layer is formed over a reflecting-mirror region inside the waveguide region. The method further includes forming and patterning a bottom cladding layer in a wave-tunnel region inside the waveguide region and forming and patterning a core layer and a top cladding layer in the waveguide region.

PRIORITY DATA

The present application is a continuation of U.S. application Ser. No.14/715,039, filed May 18, 2015, which is a continuation of U.S.application Ser. No. 13/399,098, filed Feb. 17, 2012, each of which ishereby incorporated by reference in its entirety.

BACKGROUND

Manufacturing of waveguide devices has experienced exponential growth.In general, an optical wave is confined inside a waveguide device by atotal internal reflection from the waveguide walls. Among variouswaveguides, polymer optical waveguides have attracted a lot ofattentions because of its process availability and manufacturingfeasibility. Traditional method of forming a polymer waveguide over aprinted circuit board (PCB) or other carriers is to employ a mold toimprint polymer together with a temperature curing process. However,imprinting process raises challenges to keep an adequate uniformity onwhole imprinting area. Moreover, life time of the mold brings anotherconcern.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is best understood from the following detaileddescription when read with the accompanying figures. It is emphasizedthat, in accordance with the standard practice in the industry, variousfeatures are not drawn to scale and are used for illustration purposesonly. In fact, the dimensions of the various features may be arbitrarilyincreased or reduced for clarity of discussion.

FIG. 1 is a flowchart of an example method for making a waveguide deviceconstructed according to various aspects of the present disclosure.

FIGS. 2-11 illustrate cross sectional views of various aspects of oneembodiment of fabricating a polymer waveguide device at various stagesof processes constructed according to aspects of the present disclosure.

DETAILED DESCRIPTION

It is understood that the following disclosure provides many differentembodiments, or examples, for implementing different features of theinvention. Specific examples of components and arrangements aredescribed below to simplify the present disclosure. These are, ofcourse, merely examples and are not intended to be limiting. Moreover,the performance of a first process before a second process in thedescription that follows may include embodiments in which the secondprocess is performed immediately after the first process, and may alsoinclude embodiments in which additional processes may be performedbetween the first and second processes. Various features may bearbitrarily drawn in different scales for the sake of simplicity andclarity. Furthermore, the formation of a first feature over or on asecond feature in the description that follows may include embodimentsin which the first and second features are formed in direct contact, andmay also include embodiments in which additional features may be formedbetween the first and second features, such that the first and secondfeatures may not be in direct contact.

FIG. 1 is a flowchart of one example embodiment of a method 100 forfabricating a waveguide device 200. The method 100 is described withreference to FIGS. 2 through 10.

The method 100 begins at step 102 by providing a semiconductor substrate210. The substrate 210 includes silicon. Alternatively, the substratemay include germanium, silicon germanium, gallium arsenide or otherappropriate semiconductor materials. Also alternatively, thesemiconductor substrate 210 may include an epitaxial layer. For example,the substrate 210 may have an epitaxial layer overlying a bulksemiconductor. Further, the substrate 210 may be strained forperformance enhancement. For example, the epitaxial layer may include asemiconductor material different from those of the bulk semiconductorsuch as a layer of silicon germanium overlying bulk silicon or a layerof silicon overlying a bulk silicon germanium formed by a processincluding selective epitaxial growth (SEG). Furthermore, the substrate210 may include a semiconductor-on-insulator (SOI) structure such as aburied dielectric layer. Also alternatively, the substrate may include aburied dielectric layer such as a buried oxide (BOX) layer, such as thatformed by a method referred to as separation by implantation of oxygen(SIMOX) technology, wafer bonding, SEG, or other appropriate method. Inthe present embodiment, the substrate 210 includes silicon with (100)crystal orientation.

In FIG. 2, the substrate 210 divides into two regions: anelectro-interconnection region 215 and a waveguide region 216. Theelectro-connection region 215 includes a plurality of patterneddielectric layers and patterned conductive layers that provideinterconnections (e.g., wiring) between the various components,circuitry, and input/output of an IC device. In the depicted embodiment,a patterned dielectric layer 220 is formed over the substrate 210 in theelectro-connection region 215 by depositing, patterning and etchingtechniques. The dielectric layer 220 may be deposited by chemical vapordeposition (CVD), high density plasma CVD (HDP-CVD), spin-on, physicalvapor deposition (PVD or sputtering), or other suitable methods. Thedielectric layer 220 may include silicon oxide, silicon nitride, siliconoxynitride, a low-k material, or other suitable materials. Additionallyor alternatively, an interfacial layer may be interposed between thesubstrate 210 and the dielectric layer 220. The interfacial layer mayinclude silicon oxide formed by a proper technique, such as an atomiclayer deposition (ALD), thermal oxidation or UV-Ozone Oxidation. In thedepicted embodiment, the dielectric layer 220 includes silicon oxide andis deposited by a CVD technique.

Referring to FIG. 2, the dielectric layer 220 is patterned byphotolithography and etch processes. An exemplary photolithographyprocess may include processing steps of photoresist coating, softbaking, mask aligning, exposing, post-exposure baking, developingphotoresist and hard baking. The photolithography exposing process mayalso be implemented or replaced by other methods such as masklessphotolithography, electron-beam writing, ion-beam writing, and molecularimprint. The etch technique may include dry etch, wet etch, or acombination of dry and wet etch. As an example, a wet etch process mayinclude exposure to a hydroxide containing solution (e.g., ammoniumhydroxide), deionized water, and/or other suitable etchant solutions. Asanother example, a dry etch process may utilize a medium-density plasmaetch system equipped with a capacitively coupled plasma source, or ahigh-density plasma etch system equipped with either inductive, helicon,or electron cyclotron resonance (ECR) plasmas, wherein the exposedmaterial is anisotropically removed by plasma.

In the electro-interconnection region 215, a patterned conductive layer230, referred to as a patterned redistribution layer (RDL) 230, isformed over the dielectric layer 220 by depositing, patterning andetching techniques. The patterned RDL 230 may contain conductivematerials such as aluminum, aluminum/silicon/copper alloy, copper,titanium, titanium nitride, tungsten, metal silicide, or combinationsthereof. The patterned RDL 230 may be deposited by a process includingPVD, CVD, ALD, or combinations thereof. The patterned RDL 230 ispatterned to form a plurality of conductive pads to electrically coupleto one or more electronic components of the waveguide device 200 to anexternal device. The patterning process includes photolithography, etchand photoresist stripping processes. For example, the dry etchingprocess may implement an oxygen-containing gas, fluorine-containing gas(e.g., CF4, SF6, CH2F2, CHF3, and/or C2F6), chlorine-containing gas(e.g., C12, CHCl3, CCl4, and/or BCl3), bromine-containing gas (e.g., HBrand/or CHBR3), iodine-containing gas, other suitable gases and/orplasmas, and/or combinations thereof.

Still referring to FIG. 2, a patterned passivation layer 240 is formedover the patterned RDL 230 in the electro-interconnection region 215.The patterned passivation layer 240 includes a silicon nitride or asilicon oxide material, or combinations thereof. The patternedpassivation layer 240 is formed by a process that may include CVD, PVD,ALD, combinations thereof, or another suitable process. The patternedpassivation layer 240 provides a sealing function for the variousfeatures in the electro-connection region 215, so that they are lesslikely to be eroded or damaged by external components. For example, thepatterned passivation layer 240 prevents moisture, dust, and othercontaminant particles from reaching inside the waveguide device 200,which may degrade the performance of the inside the waveguide device 200and/or shorten its lifespan. A plurality of openings 245 are formed inportions of the patterned passivation layer 240 to exposure a portion ofthe patterned RDL 230. The openings 245 may be formed byphotolithography and etch processes in a conventional manner.

The method 100 proceeds to step 104 to form a reflecting-mirror trench310 in the waveguide region 216 by etching the substrate 210, as shownin FIG. 3. The reflecting-mirror trench 310 is formed with a sidewallprofile of about 45° incline slope (referred to as a reflecting-mirrorregion 315) and a flat bottom having a depth, d, referred to as awave-tunnel region 316. The etch technique may include dry etch, wetetch, or a combination of dry and wet etch. As an example, a wet etchmay include etchants such as of ethylene diamine pyrocatechol (EDP),potassium hydroxide (KOH), and tetramethyl ammonium hydroxide (TMAH). Inorder to achieve 45° incline slope, a proper etchant concentrationratio, etching temperature and etching rate is chosen, known in the art.In the depicted embodiment, the substrate 210 is etched by a KOH wetetch and the depth d of the reflecting-mirror trench 310 is about 30 umor larger.

The method 100 proceeds to step 106 by forming a reflecting layer 320over the substrate 210, as shown in FIG. 4. In theelectro-interconnection region, the reflecting layer 320 is disposedover the openings 245 to provide adequate adhesion to the patterned RDL230 there below and serves as a wetting layer for conductive terminalsto be formed above later. In the waveguide region 216, the reflectinglayer 320 is disposed on the reflecting-mirror region 315 and thewave-tunnel region 316. The reflecting layer 320 may be selected suchthat it provides a high reflectivity to a selected radiationtype/wavelength (e.g., reflectivity of 70%). The reflecting layer 320may include aluminum, aluminum/silicon/copper alloy, copper, titanium,titanium nitride, nickel, tungsten, metal silicide, or combinationsthereof. The reflecting layer 320 may also include a stack of multiplelayers, such as having multiple pairs of molybdenum-silicon ormolybdenum-beryllium. The reflecting layer 320 may be formed by variousmethods, PVD, CVD, a plating process such as electrode-less plating orelectroplating, ion beam deposition, and/or other methods known in theart.

The method 100 proceeds to step 108 by forming a patterned bottomcladding layer 330 in the wave-tunnel region 316, as shown in FIG. 5.The patterned bottom cladding layer 330 includes silicon oxide, siliconnitride, silicon oxynitride, a low-k material. The patterned bottomcladding layer 330 may also include polymers of imide monomers, forexample pyromellitic dianhydride monomers, or other suitable materials.The patterned bottom cladding layer 330 may be deposited over thesubstrate 210 by CVD, HDP-CVD, spin-on-coating, PVD, or other suitablemethods. The patterning process may include photolithography, etchingand photoresist stripping processes, in a conventional manner.

In the depicted embodiment, the patterned bottom cladding layer 330includes a negative photo-sensitive polymer material such as Ormoclad(from Micro Resist Technology), which is siloxane basedinorganic-organic hybrid material. Alternatively, the photo-sensitivepolymer may include a positive photo-sensitive polymer. The patternedbottom cladding layer 330 is formed over the substrate 210 by a spin-oncoating process. The formation of the patterned bottom layer 330 in thewave-tunnel region 316 does not require an etching process. Rather, aphotolithography process is used to directly transfer a desired patternfrom a photomask (not illustrated) to the bottom cladding layer 330 toform the patterned bottom cladding layer 330 in the wave-tunnel region316. An exposure process is performed on the bottom cladding layer 330(a photo-sensitive layer). The exposure process includes introducing aradiation beam to the bottom cladding layer 330. The radiation beam maybe ultraviolet and/or can be extended to include other radiation beamssuch as ion beam, x-ray, extreme ultraviolet, deep ultraviolet, andother proper radiation energy. For a negative type of photo-sensitivepolymer, the exposed portions of the polymer become insoluble uponexposure, while the unexposed portions remain soluble.

Continuing in step 108, the exposed bottom cladding layer 330 isdeveloped (e.g., a developer is applied to the exposed bottom claddinglayer 330 to remove the soluble portions of the layer). The substrate210 may be immersed in a developer liquid for a predetermined amount oftime during which a portion of the bottom cladding layer 330 isdissolved and removed. A separate, additional rinse may also be applied.The composition of the developer solution is dependent on thecomposition of the bottom cladding layer 330. For example, a basesolution of 2.38% (TMAH) is used. However, other compositions suitablecompositions now known or later developed are also within the scope ofthe disclosure. A surfactant may also be included. The surfactant may beselected from surfactants such as, 3M Novec fluid HFE-7000, and/or othersurfactants known in the art. The developer may be applied by a puddlingprocess, immersion, spray, and/or other suitable methods.

The method 100 proceeds to step 110 by forming and patterning a corelayer 340 in the waveguide region 216, as shown in FIGS. 6 and 7. Thecore layer 340 includes a photo-sensitive polymer, such as Epocore (fromMicro Resist Technology), which is an epoxy based polymer. In thedepicted embodiment, the core layer 340 is coated by a spin-on process.The spin-on process may include multi-steps with different spin speedsin each step. The spin-on process starts with a low spin speed (referredto as an initial step) to coat the core layer 340 uniformly over thesubstrate 210. Then the spin-on process proceeds to a faster main spinstep to achieve a target coating thickness of the core layer 340. Thenthe main spin step is followed by another low spin speed step or anon-spin step (referred to as a waiting step) to allow the core layer340 to reflow and achieve a more conformable coating profile along thetopography of the substrate 210, especially in a conjunction with theelectro-interconnection region 215 and the reflecting-mirror region 315.As an example, spin speed of the initial step is within a range of300-1500 rpm while the spin speed of the waiting step is less than 500rpm. As another example, the spin speed of the waiting step is set aszero. The spin speed of the main spin step is determined bycharacteristics of the core layer 340, such as material type, viscosityand spin-curve. In the present embodiment, a target of thickness of thecore layer 340 is approximately to half the depth of the reflectingmirror trench (d). By using an optimized spin-on process, the core layer340 may cover the inclined reflecting-mirror region 315 without formingextrusion bump, which can be hider the later assembly process.

Still continuing in step 110, the processes of patterning the core layer340 is similar in many respects to those discussed above in associationwith the patterning process of the patterned bottom cladding layer 330.The patterned core layer 340 is formed over the reflecting layer 320 inthe reflecting-mirror region 315 and over patterned bottom claddinglayer 330 in the wave-tunnel region 316, as shown in FIG. 7.

The method 100 proceeds to step 112 by forming and patterning a topcladding layer 350 in the waveguide region 216, as shown in FIG. 8. Thetop cladding layer 350 may include the same polymer as the patternedbottom cladding layer 330 or a different polymer. The patterned topcladding layer 350 is formed over the patterned core layer 340. In thepresent embodiment, the process of forming the top cladding layer 350 issimilar in many respects to those discussed above in association withthe coating process of the core layer 340. The processes of patterningthe top layer 350 is similar in many respects to those discussed abovein association with the patterning process of the patterned bottomcladding layer 330.

Referring also to FIG. 8, a waveguide structure 360 is formed in thereflecting-mirror region 315 and the wave-tunnel region 316. In thereflecting-mirror region 315, the waveguide structure 360 has thepatterned top cladding layer 350 (on top of the core layer 340), thepatterned core layer 340 on top of the reflecting layer 320. In thewave-tunnel region 316, the waveguide structure 360 has the patternedtop cladding layer 350 (on top of the core layer 340), the patternedcore layer 340 (on top of the bottom cladding layer 330), the bottomcladding layer 330 on top of the reflecting layer 320.

Refractive indexes among the patterned bottom cladding layer 330, thepatterned core layer 340 and the patterned top cladding layer 350 areconfigured to obtain a total wave reflection, for a target wavelength orwavelength range, from interfaces of the patterned core layer and thepatterned bottom/top cladding layers. Thus a wave propagates inside thepatterned core layer 340 in a “zigzag” way along the waveguide tunnel.In the depicted embodiment, the refractive index of the patterned corelayer 340 is at least 0.025 larger than those of the patterned claddinglayers 330 and 350. The patterned core layer 340 and the patternedcladding layers 330/350 are selected to be transparent to communicationwavelength (600 nm-1600 nm) and have less than 2% volume and thicknessvariation during a subsequent bonding process, which will be describedlater.

In another embodiment, a waveguide structure 370 is formed in thereflecting-mirror region 315 and the wave-tunnel region 316, as shown inFIG. 9. In the reflecting-mirror region 315, both the patterned topcladding layer 350 and the core layer 340 are removed by a patterningprocess. Meanwhile in the wave-tunnel region 316, the waveguidestructure 370 has the patterned top cladding layer 350 (on top of thepatterned core layer 340), the patterned core layer 340 (on top of thebottom cladding layer 330), the patterned bottom cladding layer 330 ontop of the patterned the reflecting layer 320. In the waveguidestructure 370, a vacancy space is formed above the reflecting layer 320in the reflecting-mirror region 315. One or more functionary elements,such as ball lenses or micro-lenses may be built in the vacancy space.

The method 100 proceeds to step 114 by bonding the waveguide device 200with an external device through a bonding stack 405. The bonding stack405 may include solder balls or solder bumps. The bonding stack 405 mayalso include multiple bonding metals, such as gold (Au), gold tin(AuSn), gold indium (AuIn), or other suitable metal to achieve eutecticboding or other wafer bonding mechanism. The bonding stack 405 allowsexternal devices to be electrically coupled to (or gain electricalaccess to) the waveguide device 200. The bonding stack 450 may be formedby evaporation, electroplating, printing, jetting, stud bumping, orother suitable techniques. The external device may include laser diodes,photo detectors, integrated optical circuits, or other opticalcomponents. In the present embodiment, the external device includes avertical-cavity surface-emitting laser (VCSEL) 410.

The bonding process may involve techniques such as a flip-chip or a wirebonding. In the depicted embodiment, a flip-chip technique is appliedduring the bonding process to bond the VCSEL 410 to the waveguide device200 together to form a device pair 450, as shown in FIGS. 10 and 11. Aflip-chip technique is a method to directly connect a face-down (hence,“flipped”) a first electronic component on to a second electroniccomponent, by means of conductive bumps that have been deposited ontopads on a top side of the first electronic component and conductive padsthat have been deposited onto corresponding locations on the secondelectronic component.

Referring to FIG. 10, an incident light beam 415 emits from the VCSEL410 and travels through the patterned top cladding layer 350 and thepatterned core layer 340, injects on surface of the reflecting layer 320in the reflecting-mirror region 315, reflects its direction in 90° bythe 45° reflecting-mirror inclined slop, is directed into the patternedcore layer 340 in the waveguide-tunnel region 316. The light beam 415 isconfined in the patterned core layer 340 by a total internal reflection.The light beam 415 is reflected back and forth between the twointerfaces of the patterned core layer 340 and propagates along thewaveguide tunnel.

Referring to FIG. 11, it is similar in many respects to those discussedabove in association with FIG. 10, except that the incident light beam415 emitting from the VCSEL 410 injects directly on the surface of thereflecting layer 320 in the reflecting-mirror region 315. With one ormore embedded functionary elements, such as a focusing element, in thevacancy space above the reflecting layer 320 in the reflecting-mirrorregion 315, the light beam 415 may be modulated to improve opticalperformance or apply other suitable functions.

Based on the discussions above, it can be seen that the presentdisclosure offers the method 100 to fabricate a polymer waveguide on asemiconductor substrate by using photo-sensitive polymer with designedrefractive index contrast and thickness. The waveguide tunnel is formedby well-known techniques, such as spin-on coating and photolithographypatterning. It has been demonstrated that a uniform coverage of thepatterned core layer and the patterned top cladding layers in thereflecting-mirror region, will enhance the efficiency of coupling lightinto the waveguide tunnel. The method 100 provides a bump-lessdeposition (coating) process to form the patterned core layer and thepatterned top/bottom cladding layers, which significantly simplifies thefabrication process to avoid a further planarization process. The method100 provides robust waveguide processes without imprinting by usingmold. It improves waveguide device reliability and life-time.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentinvention. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1. A device comprising: a substrate having a first region and a secondregion; a conductive layer disposed over the substrate in the firstregion; a passivation layer disposed over the conductive layer in thefirst region; a reflecting layer that includes a first portion disposedover the passivation layer in the first region and a second portiondisposed over the second region of the substrate; a first cladding layerdisposed over the reflecting layer in the second region; a core layerdisposed over the first and second portions of the reflecting layer suchthat the core layer prevent the first and second portions of thereflecting layer from interfacing with each other, wherein the corelayer includes polymer; and a second cladding layer disposed over corelayer in the second region.
 2. The device of claim 1, wherein the corelayer physically contacts the substrate, and wherein the reflectinglayer physically contacts the substrate.
 3. The device of claim 2,wherein the substrate includes silicon.
 4. The device of claim 1,wherein at least one of the first cladding layer and the second claddinglayer includes polymer.
 5. The device of claim 1, wherein the firstportion of the reflecting layer is further disposed over a portion ofthe conductive layer.
 6. The device of claim 1, further comprising alaser disposed over the first region.
 7. The device of claim 1, whereinthe conductive layer has a top surface facing away from the substrateand a sidewall surface extending toward the substrate, and wherein thepassivation layer physically contacts the top surface and sidewallsurface of the conductive layer.
 8. A device comprising: a semiconductorsubstrate having a circuitry region and a waveguide region, wherein thesemiconductor substrate further includes a first surface and a secondsurface defining a trench; a reflecting layer disposed within the trenchalong the first and second surfaces; a first cladding layer disposedover the reflecting layer in the waveguide region without extending tothe circuitry region of the semiconductor substrate; a core layerdisposed over the first and second surfaces of the semiconductorsubstrate; and a second cladding layer disposed over the first andsecond surfaces of the semiconductor substrate.
 9. The device of claim8, wherein the core layer is disposed over the circuitry region and thewaveguide region of the semiconductor substrate, and wherein the secondcladding layer is disposed over the circuitry region and the waveguideregion of the semiconductor substrate.
 10. The device of claim 8,further comprising a passivation layer disposed over the conductivelayer in the circuitry region of the semiconductor substrate, andwherein the reflecting layer is further disposed over the passivationlayer in the first circuitry region of the semiconductor substrate. 11.The device of claim 10, wherein a portion of the core layer is disposeddirectly on the first surface of the semiconductor substrate.
 12. Thedevice of claim 8, wherein the first surface intersects with the secondsurface at an angle of about 45°.
 13. The device of claim 8, furthercomprising a dielectric layer disposed over the semiconductor substratein the circuitry region, the dielectric layer having a top surfacefacing away from the semiconductor substrate; a conductive layerdisposed over the semiconductor substrate in the circuitry region; and apassivation layer disposed over the conductive layer in the circuitryregion of the semiconductor substrate, and wherein the conductive layerand the passivation layer physically contact the top surface of thedielectric layer.
 14. The device of claim 8, wherein the reflectinglayer includes a first portion extending along the first surface of thesemiconductor substrate and a second portion extending along the secondsurface of the semiconductor substrate, wherein the first cladding layerextends along the first portion of the reflecting layer withoutextending to the second portion of the reflecting layer.
 15. A devicecomprising: a conductive layer disposed over a first region of asemiconductor substrate; a passivation layer disposed over theconductive layer in the first region of the semiconductor substrate; areflecting layer disposed over the passivation layer in the first regionof the semiconductor substrate and further disposed directly on thesemiconductor substrate in a second region of the semiconductorsubstrate such that the reflecting layer physically contacts thesemiconductor substrate in the second region; a first cladding layerdisposed over the reflecting layer in the second region of thesemiconductor substrate; a core layer disposed over the first claddinglayer in the second region of the semiconductor substrate; and a secondcladding layer disposed over the core layer in the second region of thesemiconductor substrate, wherein at least one of the first claddinglayer, the core layer and the second cladding layer overlaps thepassivation layer.
 16. The device of claim 15, wherein the firstcladding layer is formed of a different material than the secondcladding layer.
 17. The device of claim 15, wherein each of the firstcladding layer, the core layer and the second cladding layer aredisposed over the second region of the semiconductor substrate withoutextending to over the first region of the semiconductor substrate. 18.The device of claim 15, wherein a first surface of the semiconductorsubstrate and a second surface of the semiconductor substrate define atrench; wherein the first surface intersects the second surface at angleof about 45°; and wherein the reflecting layer is disposed directly onthe first and second surfaces of the semiconductor substrate such thatthe reflecting layer physically contacts the first and second surfacesof the semiconductor substrate.
 19. The device of claim 18, furthercomprising an optical device coupled to the reflecting layer disposedover the passivation layer in the first region of the semiconductorsubstrate.
 20. The device of claim 15, wherein the second cladding layeris further disposed over the reflecting layer in the first region of thesemiconductor substrate.